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Microelectronic applications of chemical mechanical planarization /

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Bibliographic Details
Corporate Author: Wiley InterScience (Online service)
Other Authors: Li, Yuzhuo
Format: eBook
Language:English
Published: Hoboken, N.J. : Wiley-Interscience, [2008]
Subjects:
Chemical mechanical planarization.
Integrated circuits > Design and construction.
Microelectronics > Materials.
Electronic books.
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Connect to the full text of this electronic book
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Call Number: TK7874 .M4675 2008eb
 
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TK7874 .M4675 2008eb Available