Photonic MEMS devices : design, fabrication and control /

Bibliographic Details

Main Author:	Liu, Ai-Qun
Format:	Book
Language:	English
Published:	Boca Raton, FL : CRC Press, [2009]
Series:	AIP conference proceedings. Optical science and engineering series ; 136.
Subjects:	Microelectromechanical systems. Photonics.