Principles of physical vapor deposition of thin films /

The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...

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Bibliographic Details

Main Author:	SreeHarsha, K. S.
Format:	eBook
Language:	English
Published:	Amsterdam ; Boston ; London : Elsevier, 2006.
Edition:	1st ed.
Subjects:	Thin films. Vapor-plating. Couches minces. Dépôt en phase vapeur. Electronic books.
Online Access:	Connect to the full text of this electronic book Publisher description