Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving /

Bibliographic Details
Main Author:	Wüthrich, Rolf
Format:	Book
Language:	English
Published:	Oxford, UK ; Burlington, MA : William Andrew, 2009.
Edition:	1st ed.
Series:	Micro & nano technologies ; 6.
Subjects:	Micromachining. Electrochemical cutting. Electric discharges > Industrial applications. Plasma etching.

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