Cover Image

Fundamentals of semiconductor manufacturing and process control /

Show other versions (1)
Bibliographic Details
Main Author: May, Gary S.
Corporate Author: John Wiley & Sons
Other Authors: Spanos, Costas J.
Format: eBook
Language:English
Published: [Piscataway, N.J.] : Hoboken, N.J. : IEEE ; Wiley-Interscience, [2006]
Subjects:
Integrated circuits > Design and construction.
Process control > Statistical methods.
Semiconductors > Design and construction.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xix, 463 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471784060 (cloth : alk. paper)
0471790281 (electronic bk.)
9780471784067 (cloth : alk. paper)
9780471790280 (electronic bk.)
DOI:10.1002/0471790281