Fundamentals of semiconductor manufacturing and process control /

Bibliographic Details
Main Author:	May, Gary S.
Corporate Author:	John Wiley & Sons
Other Authors:	Spanos, Costas J.
Format:	eBook
Language:	English
Published:	[Piscataway, N.J.] : Hoboken, N.J. : IEEE ; Wiley-Interscience, [2006]
Subjects:	Integrated circuits > Design and construction. Process control > Statistical methods. Semiconductors > Design and construction. Electronic books.
Online Access:	Connect to the full text of this electronic book

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