Hf-based high-k dielectrics : process development, performance characterization, and reliability /
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
[San Rafael, Calif.] :
Morgan & Claypool Publishers,
[2005]
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| Edition: | 1st ed. |
| Series: | Synthesis lectures on solid state materials and devices (Online)
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Title from PDF title page (viewed on Dec. 2, 2005). Series statement from caption on home page. Electronic resource. |
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| Physical Description: | x, 92 pages : digital, PDF file Also available in print. |
| Format: | System requirements: Adobe Acrobat Reader. Mode of access: World Wide Web. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 1598290045 9781598290042 |
| Access: | Available to subscribers only. |