Hf-based high-k dielectrics : process development, performance characterization, and reliability /

Bibliographic Details
Main Author:	Kim, Young-Hee, 1972-
Other Authors:	Lee, Jack Chung-Yeung
Format:	eBook
Language:	English
Published:	[San Rafael, Calif.] : Morgan & Claypool Publishers, [2005]
Edition:	1st ed.
Series:	Synthesis lectures on solid state materials and devices (Online)
Subjects:	Dielectrics. Hafnium oxide. Integrated circuits > Reliability. Semiconductors > Junctions. Breakdown (Electricity) Metal oxide semiconductor field-effect transistors. Electronic books.
Online Access:	Connect to the full text of this electronic book

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