Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA /
| Corporate Authors: | Society of Photo-optical Instrumentation Engineers, International SEMATECH |
|---|---|
| Other Authors: | Singh, Vivek K., Rieger, Michael L. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2008]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6925. |
| Subjects: | |
| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6925.toc |
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