Plasma-aided nanofabrication : from plasma sources to nanoassembly /

Bibliographic Details

Main Author:	Ostrikov, K. (Kostya)
Corporate Author:	Wiley InterScience (Online service)
Other Authors:	Xu, Shuyan
Format:	eBook
Language:	English
Published:	Weinheim : Wiley-VCH, [2007]
Subjects:	Low temperature plasmas. Manufacturing processes. Nanostructured materials. Plasma engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book