Dielectric films for advanced microelectronics /

Bibliographic Details
Corporate Author:	Wiley InterScience (Online service)
Other Authors:	Baklanov, Mikhail (Editor), Green, Martin (Editor), Maex, Karen (Editor)
Format:	eBook
Language:	English
Published:	Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007]
Series:	Wiley series in materials for electronic and optoelectronic applications.
Subjects:	Dielectric films. Microelectronics > Materials. Electronic books.
Online Access:	Connect to the full text of this electronic book

Available Online