Cover Image

MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Boston University. Photonics Center
Other Authors: Tadigadapa, Srinivas A., Parviz, Babak A., Henning, Albert Karl
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2008]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6885.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Transducers > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6885.toc
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780819470607
0819470600