MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Boston University. Photonics Center
Other Authors:	Tadigadapa, Srinivas A., Parviz, Babak A., Henning, Albert Karl
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2008]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6885.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses. Transducers > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6885.toc

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