Society of Photo-optical Instrumentation Engineers, Boston University. Photonics Center, Tadigadapa, S. A., Parviz, B. A., & Henning, A. K. (2008). MEMS/MOEMS components and their applications V: Special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Boston University. Photonics Center, Srinivas A. Tadigadapa, Babak A. Parviz, and Albert Karl Henning. MEMS/MOEMS Components and Their Applications V: Special Focus Topics : Transducers at the Micro-nano Interface : 21-22 January 2008, San Jose, California, USA. Bellingham, Washington: SPIE, 2008.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. MEMS/MOEMS Components and Their Applications V: Special Focus Topics : Transducers at the Micro-nano Interface : 21-22 January 2008, San Jose, California, USA. SPIE, 2008.