Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2008]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6882. |
| Subjects: | |
| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6882.toc |
Internet
https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6882.tocEvans: Library Stacks
| Call Number: |
TJ1191.5 .M54 2008 |
|
|---|---|---|
| Call Number | Status | Get It |
| TJ1191.5 .M54 2008 | Available | |