Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Boston University. Photonics Center
Other Authors:	Perez-Maher, Mary Ann, Chiao, Jung-Chih, Resnick, Paul J.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2008]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6882.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses. Miniature electronic equipment > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6882.toc

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