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MEMS and microsystems : design, manufacture, and nanoscale engineering /

Bibliographic Details
Main Author: Hsu, Tai-Ran
Format: Book
Language:English
Published: Hoboken, N.J. : John Wiley, [2008]
Edition:2nd ed.
Subjects:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Online Access:Table of contents only
Publisher description
Contributor biographical information
Description
Physical Description:xxv, 550 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 509-521) and index.
ISBN:9780470083017 (cloth)
0470083018 (cloth)