MEMS and microsystems : design, manufacture, and nanoscale engineering /

Bibliographic Details
Main Author:	Hsu, Tai-Ran
Format:	Book
Language:	English
Published:	Hoboken, N.J. : John Wiley, [2008]
Edition:	2nd ed.
Subjects:	Microelectronics. Microelectromechanical systems. Microelectronic packaging.
Online Access:	Table of contents only Publisher description Contributor biographical information

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