Reliability of MEMS /

Bibliographic Details
Other Authors:	Tsuchiya, Toshiyuki, Tabata, Osamu, 1956-
Format:	Book
Language:	English
Published:	Weinheim : Wiley-VCH, [2008]
Series:	Advanced micro & nanosystems ; v.6.
Subjects:	Microelectromechanical systems > Reliability.

Published 2008

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