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Reliability of MEMS /

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Bibliographic Details
Other Authors: Tsuchiya, Toshiyuki, Tabata, Osamu, 1956-
Format: Book
Language:English
Published: Weinheim : Wiley-VCH, [2008]
Series:Advanced micro & nanosystems ; v.6.
Subjects:
Microelectromechanical systems > Reliability.

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TK7875 .R437 2008
 
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TK7875 .R437 2008 Available