Reliability of MEMS /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2008]
|
| Series: | Advanced micro & nanosystems ;
v.6. |
| Subjects: |
| Item Description: | "Testing of materials and devices"--Cover. |
|---|---|
| Physical Description: | xx, 303 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9783527314942 3527314946 |