MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui, Nihon Kōgakkai (Ōyō Butsuri Gakkai), Zhongguo ke xue ji shu xie hui, Guo jia zi ran ke xue ji jin wei yuan hui (China), China. Guo jia ke xue ji shu bu
Other Authors:	Chiao, Jung-Chih
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2008]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6836.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6836.to

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