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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Australian National University, Australian National University. Research School of Physical Sciences, University of Adelaide. Centre for Biomedical Engineering
Other Authors:	Tan, Hark Hoe
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2008]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6800.
Subjects:	Microelectromechanical systems > Congresses. Photonics > Congresses. Photomechanical processes > Congresses. Photolithography > Congresses. Nanotechnology > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6800.toc

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