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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Australian National University, Australian National University. Research School of Physical Sciences, University of Adelaide. Centre for Biomedical Engineering
Other Authors: Tan, Hark Hoe
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2008]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6800.
Subjects:
Microelectromechanical systems > Congresses.
Photonics > Congresses.
Photomechanical processes > Congresses.
Photolithography > Congresses.
Nanotechnology > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6800.toc

Internet

https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6800.toc

Remote Storage

Holdings details from Remote Storage
Call Number: TK7875 .D48 2008
 
Call Number Status Get It
TK7875 .D48 2008 Available