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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Australian National University, Australian National University. Research School of Physical Sciences, University of Adelaide. Centre for Biomedical Engineering
Other Authors: Tan, Hark Hoe
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2008]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6800.
Subjects:
Microelectromechanical systems > Congresses.
Photonics > Congresses.
Photomechanical processes > Congresses.
Photolithography > Congresses.
Nanotechnology > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6800.toc
Description
Item Description:Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics.
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780819469717
0819469718