Society of Photo-optical Instrumentation Engineers, Australian National University, Australian National University. Research School of Physical Sciences, University of Adelaide. Centre for Biomedical Engineering, & Tan, H. H. (2008). Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV: 5-7 December 2007, Canberra, Australia. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Australian National University, Australian National University. Research School of Physical Sciences, University of Adelaide. Centre for Biomedical Engineering, and Hark Hoe Tan. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV: 5-7 December 2007, Canberra, Australia. Bellingham, Washington: SPIE, 2008.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV: 5-7 December 2007, Canberra, Australia. SPIE, 2008.