Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. /
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society, c2007.
[date of publication not identified]
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| Series: | Materials Research Society symposia proceedings ;
v. 991. |
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| Item Description: | "Proceedings ... presented at Symposium C, 'Advances and Challenges in Chemical Mechanical Planarization,' held April 10-12 at the 2007 MRS Spring Meeting"--Pref. |
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| Physical Description: | xi, 371 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558999515 9781558999510 |