Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Author:	Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" San Francisco, Calif.
Other Authors:	Zwicker, Gerfried
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, c2007. [date of publication not identified]
Series:	Materials Research Society symposia proceedings ; v. 991.
Subjects:	Semiconductors > Materials > Congresses. Semiconductors > Surfaces > Congresses. Chemical mechanical planarization > Congresses.

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