APA (7th ed.) Citation

Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" San Francisco, Calif, & Zwicker, G. Advances and challenges in chemical mechanical planarization: Symposium held April 10-12, 2007, San Francisco, California, U.S.A. Materials Research Society, c2007.

Chicago Style (17th ed.) Citation

Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" San Francisco, Calif, and Gerfried Zwicker. Advances and Challenges in Chemical Mechanical Planarization: Symposium Held April 10-12, 2007, San Francisco, California, U.S.A. Warrendale, Pa.: Materials Research Society, c2007.

MLA (9th ed.) Citation

Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" San Francisco, Calif, and Gerfried Zwicker. Advances and Challenges in Chemical Mechanical Planarization: Symposium Held April 10-12, 2007, San Francisco, California, U.S.A. Materials Research Society, c2007.