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Plasma-aided nanofabrication : from plasma sources to nanoassembly /

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Bibliographic Details
Main Author: Ostrikov, K. (Kostya)
Other Authors: Xu, Shuyan
Format: Book
Language:English
Published: Weinheim : Wiley-VCH, [2007]
Subjects:
Nanostructured materials.
Plasma engineering.
Low temperature plasmas.
Manufacturing processes.
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