Plasma-aided nanofabrication : from plasma sources to nanoassembly /

Bibliographic Details

Main Author:	Ostrikov, K. (Kostya)
Other Authors:	Xu, Shuyan
Format:	Book
Language:	English
Published:	Weinheim : Wiley-VCH, [2007]
Subjects:	Nanostructured materials. Plasma engineering. Low temperature plasmas. Manufacturing processes.