Cover Image

Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain /

Bibliographic Details
Corporate Authors: SPIE Europe, PhOREMOST, Society of Photo-optical Instrumentation Engineers
Other Authors: Becker, Thomas, Cané, Carles, Barker, N. Scott (Nicolas Scott)
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2007]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6589.
Subjects:
Microelectromechanical systems > Congresses.
Microtechnology > Congresses.
Actuators > Industrial applications > Congresses.
Detectors > Industrial applications > Congresses.
Scanning systems > Congresses.
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780819467171
0819467170