Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain /

Bibliographic Details
Corporate Authors:	SPIE Europe, PhOREMOST, Society of Photo-optical Instrumentation Engineers
Other Authors:	Becker, Thomas, Cané, Carles, Barker, N. Scott (Nicolas Scott)
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2007]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6589.
Subjects:	Microelectromechanical systems > Congresses. Microtechnology > Congresses. Actuators > Industrial applications > Congresses. Detectors > Industrial applications > Congresses. Scanning systems > Congresses.

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