Cover Image

Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Bosse, Harald, Bodermann, Bernd, Silver, Richard M.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2007]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6617.
Subjects:
Optical measurements > Congresses.
Integrated circuits > Congresses.
Semiconductors > Design and construction > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6617.toc?SSO=1
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780819467591
0819467596