Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Bosse, Harald, Bodermann, Bernd, Silver, Richard M.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2007]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6617.
Subjects:	Optical measurements > Congresses. Integrated circuits > Congresses. Semiconductors > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6617.toc?SSO=1

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