Gate stack scaling : materials, role of interfaces, and reliability implications : April 17-21, 2006, San Francisco, California, USA.

Bibliographic Details
Corporate Author:	Materials Research Society. Fall Meeting
Format:	Book
Language:	English
Published:	Warrendale, PA : Materials Research Society, [2006]
Series:	Materials Research Society symposia proceedings ; v. 917.
Subjects:	Integrated circuits > Ultra large scale integration > Materials > Congresses. Metal oxide semiconductors, Complementary > Congresses. Metal oxide semiconductor field-effect transistors > Congresses. Gate array circuits > Congresses. Dielectrics > Congresses. Electric leakage > Congresses.

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