Microlithography : science and technology /

Bibliographic Details
Other Authors:	Suzuki, Kazuaki, Smith, Bruce W., 1959-
Format:	Book
Language:	English
Published:	Boca Raton : CRC Press, [2007]
Edition:	2nd ed.
Series:	Optical science and engineering (CRC Press) 126.
Subjects:	Microlithography > Industrial applications. Integrated circuits > Masks. Metal oxide semiconductors, Complementary > Design and construction. Manufacturing processes.
Online Access:	Table of contents only Publisher description

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