Advances in resist materials and processing technology XXIV : 26-28 February 2007, San Jose, California, USA /
| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2007]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6519. |
| Subjects: |
| Item Description: | Previous conference proceedings entitled: Advances in resist technology and processing. |
|---|---|
| Physical Description: | 2 volumes (various pagings) : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780819466389 0819466387 |