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Dielectric films for advanced microelectronics /

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Bibliographic Details
Other Authors: Baklanov, Mikhail, Green, Martin, Maex, Karen
Format: Book
Language:English
Published: Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007]
Series:Wiley series in materials for electronic and optoelectronic applications.
Subjects:
Dielectric films.
Microelectronics > Materials.
Online Access:Table of contents only
Description
Physical Description:xxii, 486 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780470013601 (cloth : alk. paper)
0470013605 (hbk.)