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Dielectric films for advanced microelectronics /

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Bibliographic Details
Other Authors: Baklanov, Mikhail, Green, Martin, Maex, Karen
Format: Book
Language:English
Published: Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007]
Series:Wiley series in materials for electronic and optoelectronic applications.
Subjects:
Dielectric films.
Microelectronics > Materials.
Online Access:Table of contents only

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Call Number: TK7871.15.F5 D54 2007
 
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TK7871.15.F5 D54 2007 Available