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Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia /

Bibliographic Details
Corporate Authors: Defence Science and Technology Organisation (Australia), Society of Photo-optical Instrumentation Engineers
Other Authors: Chiao, Jung-Chih
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2007]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6415.
Subjects:
Microelectromechanical systems > Congresses.
Microtechnology > Materials > Congresses.
Nanotechnology > Materials > Congresses.
Electronic packaging > Congresses.
Description
Bibliography:Includes bibliographical references and index.
ISBN:9780819465238
0819465232