Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia /

Bibliographic Details
Corporate Authors:	Defence Science and Technology Organisation (Australia), Society of Photo-optical Instrumentation Engineers
Other Authors:	Chiao, Jung-Chih
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2007]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6415.
Subjects:	Microelectromechanical systems > Congresses. Microtechnology > Materials > Congresses. Nanotechnology > Materials > Congresses. Electronic packaging > Congresses.

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