Controller design and implementation for a 6-degree-of-freedom magnetically levitated positioner with high precision /

Bibliographic Details

Main Author:	Yu, Ho, 1980-
Other Authors:	Kim, Wŏn-jong (Thesis advisor)
Format:	Thesis eBook
Language:	English
Published:	[College Station, Tex.] : [Texas A&M University], [2005]
Subjects:	Major mechanical engineering. nanoscale microscale precision positioning control
Online Access:	Link to OAK Trust copy