Development of a quadrupole-based secondary-ion mass spectrometry (SIMS) system at Lewis Research Center /

Bibliographic Details

Main Author:	Vargas-Aburto, Carlos
Corporate Author:	United States. National Aeronautics and Space Administration
Other Authors:	Aron, Paul R., Liff, Dale Russell
Format:	Government Document Microform Book
Language:	English
Published:	[Washington, D.C.] : NASA ; [1990]
Series:	NASA technical memorandum ; 102531.
Subjects:	Secondary ion mass spectrometry. High vacuum. Ion probes. Mass spectrometers. Mass spectroscopy. Numerical control. Quadrupoles. Vacuum chambers.
Online Access:	https://purl.fdlp.gov/GPO/LPS68966