Journal of vacuum science and technology.
| New Title: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films (Online) Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online) |
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| Uniform Title: | Journal of vacuum science and technology (Online) |
| Corporate Author: | |
| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
Published by the American Vacuum Society through the American Institute of Physics,
1964-1982.
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| Subjects: | |
| Online Availability: |
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| Published: | Vol. 1, no. 1 (Sept. 1964)-v. 21, no. 4 (Nov. 1982). |
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| Item Description: | Title from issue table of contents screen (American Institute of Physics website, viewed Sept. 02, 2003). Electronic resource. |
| Publication Frequency: | 8 no. a year, 1982 |
| Format: | Mode of access: World Wide Web. |
| ISSN: | 0022-5355 1520-8559 |
| Related Items: | Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena. |