Journal of vacuum science and technology.
| New Title: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films (Online) Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online) |
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| Uniform Title: | Journal of vacuum science and technology (Online) |
| Corporate Author: | |
| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
Published by the American Vacuum Society through the American Institute of Physics,
1964-1982.
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| Subjects: | |
| Online Availability: |
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Evans: Library Stacks
| Call Number: |
TJ940 .J67 |
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| Call Number | Status | Get It |
| TJ940 .J67 | Available | |