Intelligent integrated microsystems : 19-21 April 2006, Kissimmee, Florida, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Athale, Ravindra A., Zolper, J. C.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6232.
Subjects:	Microelectromechanical systems > Congresses.

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