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Micromechanical photonics /

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Bibliographic Details
Main Author: Ukita, H. (Hiroo)
Format: Book
Language:English
Published: Berlin ; New York : Springer-Verlag, [2006]
Series:Microtechnology and MEMS.
Subjects:
Photonics.
Microelectronics.
Microelectromechanical systems.
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by Ukita, H. (Hiroo)
Published 2006
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