Micromechanical photonics /

Bibliographic Details

Main Author:	Ukita, H. (Hiroo)
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer-Verlag, [2006]
Series:	Microtechnology and MEMS.
Subjects:	Photonics. Microelectronics. Microelectromechanical systems.