Cover Image

Data analysis and modeling for process control III : 23 February 2006, San Jose, California, USA /

Bibliographic Details
Corporate Author: SEMATECH, Inc
Other Authors: Emami, Iraj, Tobin, Kenneth W.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2006]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6155.
Subjects:
Manufacturing processes > Mathematical models > Congresses.
Manufacturing processes > Automatic control > Congresses.
Intelligent control systems > Mathematical models > Congresses.
Process control > Mathematical models > Congresses.
Description
Item Description:Electronic resource.
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819461989