Data analysis and modeling for process control III : 23 February 2006, San Jose, California, USA /

Bibliographic Details
Corporate Author:	SEMATECH, Inc
Other Authors:	Emami, Iraj, Tobin, Kenneth W.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6155.
Subjects:	Manufacturing processes > Mathematical models > Congresses. Manufacturing processes > Automatic control > Congresses. Intelligent control systems > Mathematical models > Congresses. Process control > Mathematical models > Congresses.

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